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Semiconductor
High Pressure Pneumatic Diaphragm Valves
Ultra High Purity DHPVDC
Brief Description
Suitable for ultrahigh-purity applications.
Dimensions follow Semi-spec.
Max Working Pressure 3045 psig (210 bar).
Elgiloy diaphragm material with strong durability as well as corrosion resistance for long cycle life.
DI water cleaned, assembled, tested & packaged In the certified clean room.